Development of a SEM based methodology for the detection of sub-surface voids in nano-interconnects

Carbonell, LaureLaureCarbonellCaluwaerts, RudyRudyCaluwaertsHeylen, NancyNancyHeylenVolders, HennyHennyVoldersKellens, KristofKristofKellensTokei, ZsoltZsoltTokeiTakada, SSTakadaBan, NNBanIshimoto, TTIshimotoSuzuki, N.N.SuzukiUmehara, S.S.Umehara2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20418Development of a SEM based methodology for the detection of sub-surface voids in nano-interconnectsMeeting abstract