de Marneffe, Jean-FrancoisJean-Francoisde MarneffeCooke, MikeMikeCookeGoodyear, AndyAndyGoodyearBraithwaite, NicolasNicolasBraithwaiteSutton, YvonneYvonneSuttonBowden, MarkMarkBowdenAltamirano Sanchez, EfrainEfrainAltamirano SanchezZotovich, AlexeyAlexeyZotovichEl Otell, ZiadZiadEl OtellChan, BTBTChanKnoll, ArminArminKnollRawlings, ColinColinRawlingsDuerig, UrsUrsDuerigSpiesser, MartinMartinSpiesserKaestner, MarcusMarcusKaestnerNeuber, ChristianChristianNeuberRangelow, IvoIvoRangelow2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26499Advanced etching for nanodevices and 2D materialsMeeting abstractwww.mne2016.org