Waeterloos, JoostJoostWaeterloosShaffer, E.E.ShafferStokich, T.T.StokichAlves Donaton, RicardoRicardoAlves DonatonMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5825Mechanical analysis of a SiLK/Cu dual damascene interconnect systemProceedings paper