Saturation Photo-Voltage methodology for semiconductor insulator interface trap spectroscopy

Madia, OresteOresteMadiaAfanasiev, ValeriValeriAfanasievCott, DaireDaireCottArimura, HiroakiHiroakiArimuraSchulte-Braucks, C.C.Schulte-BraucksLin, DennisDennisLinBuca, D.D.BucaVon Den Driesch, N.N.Von Den DrieschNyns, LauraLauraNynsIvanov, TsvetanTsvetanIvanovCuypers, DieterDieterCuypersStesmans, AndreAndreStesmans2021-10-232021-10-2320162162-8769https://imec-publications.be/handle/20.500.12860/26937Saturation Photo-Voltage methodology for semiconductor insulator interface trap spectroscopyJournal articlehttp://jss.ecsdl.org/content/5/4/P3031.abstract