Comparative analysis of the nucleation and growth of copper on different low-k polymers

Zaporojtchenko, V.V.ZaporojtchenkoErichsen, J.J.ErichsenStrunskus, T.T.StrunskusBehnke, K.K.BehnkeFaupel, F.F.FaupelBaklanov, MikhaïlMikhaïlBaklanovMaex, KarenKarenMaex2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7093Comparative analysis of the nucleation and growth of copper on different low-k polymersProceedings paper