A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectrics

Lanckmans, FilipFilipLanckmansGeenen, LucLucGeenenVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4512A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectricsProceedings paper