Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectrics

Urbanowicz, AdamAdamUrbanowiczVanstreels, KrisKrisVanstreelsVerdonck, PatrickPatrickVerdonckVan Besien, ElsElsVan BesienTrompoukis, ChristosChristosTrompoukisShamiryan, DenisDenisShamiryanDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-1920111071-1023https://imec-publications.be/handle/20.500.12860/19929Effect of UV wavelength on the hardening process of porogen-containing and porogen-free ultra-low-k PECVD dielectricsJournal article