Nanoprober as a tool for electrical measurements of nanostructures

Olanterae, LauriLauriOlanteraeArstila, KaiKaiArstilaHantschel, ThomasThomasHantschelPalanne, SakuSakuPalanneSajavaara, TimoTimoSajavaara2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17731Nanoprober as a tool for electrical measurements of nanostructuresOral presentation