Godavarthi, SrinivasSrinivasGodavarthiWang, CongCongWangVerdonck, PatrickPatrickVerdonckMatsumoto, Y.Y.MatsumotoKoudriavtsev, IIKoudriavtsevDutt, A.A.DuttTielens, HildeHildeTielensBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220150040-6090https://imec-publications.be/handle/20.500.12860/25321Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin filmsJournal articlehttp://dx.doi.org/10.1016/j.tsf.2014.10.033