Esch, HeleenHeleenEschHuyberechts, GuidoGuidoHuyberechtsMertens, RobertRobertMertensMaes, GuidoGuidoMaesManca, JeanJeanMancaDe Ceuninck, WardWardDe CeuninckDe Schepper, LucLucDe Schepper2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4363The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensorsJournal article