High quality profiles for inorganic material using Arn+ clusters: a must for hybrid system profiling and how to achieve them

Conard, ThierryThierryConardFleischmann, ClaudiaClaudiaFleischmannHavelund, RasmusRasmusHavelundFranquet, AlexisAlexisFranquetPoleunis, ClaudeClaudePoleunisDelcorte, ArnaudArnaudDelcorteVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25096High quality profiles for inorganic material using Arn+ clusters: a must for hybrid system profiling and how to achieve themMeeting abstract