Murota, JunichiJunichiMurotaYamamoto, YuchiYuchiYamamotoCostina, IoanIoanCostinaBaerwolf, FlorianFlorianBaerwolfTillack, BerndBerndTillackLe Thanh, VinhVinhLe ThanhLoo, RogerRogerLooDouhard, BastienBastienDouhardAyyad, MustafaMustafaAyyadCaymax, MattyMattyCaymax2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29041Dopant segregation and diffusion in CVD epitaxial Grown GeMeeting abstract