Erofeev, IvanIvanErofeevHartanto, Antony WinataAntony WinataHartantoKhan, Muhaimin MareumMuhaimin MareumKhanDeng, KerongKerongDengKumar, KrishnaKrishnaKumarAabdin, ZainulZainulAabdinTjiu, Weng WeeiWeng WeeiTjiuZhang, MingshengMingshengZhangPacco, AntoineAntoinePaccoPhilipsen, HaroldHaroldPhilipsenChowdhuri, Angshuman RayAngshuman RayChowdhuriHuynh, Han VinhHan VinhHuynhHolsteyns, FrankFrankHolsteynsMirsaidov, UtkurUtkurMirsaidov2025-05-062024-11-262025-05-0620252196-7350WOS:001357050400001https://imec-publications.be/handle/20.500.12860/44846Digital Etching of Molybdenum Interconnects Using Plasma OxidationJournal article10.1002/admi.202400558WOS:001357050400001