Evaluating contact resistance using epitaxially grown phosphorous emitters

Tous, LoicLoicTousRecaman Payo, MariaMariaRecaman PayoNgamo, MichelMichelNgamoHernandez, Jose LuisJose LuisHernandezPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19906Evaluating contact resistance using epitaxially grown phosphorous emittersProceedings paper