Selective and reversible ammonia gas detection with nanoporous film fynctionalized silicon photonic micro-ring resonator

Ybanez, NatNatYbanezSree, S.P.S.P.SreeLevrau, E.E.LevrauDetavernier, C.C.DetavernierHens, ZegerZegerHensMartens, J.A.J.A.MartensBaets, RoelRoelBaets2021-10-202021-10-202012-051094-4087https://imec-publications.be/handle/20.500.12860/21887Selective and reversible ammonia gas detection with nanoporous film fynctionalized silicon photonic micro-ring resonatorJournal article