Fujikawa, MMFujikawaYamaguchi, TTYamaguchiNozawa, SSNozawaNiino, RRNiinoChanson, RomainRomainChansonBabaei Gavan, KhashayarKhashayarBabaei GavanLazzarino, FredericFredericLazzarinode Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30732Gas Phase Pore Stuffing (GPPS)Proceedings paperhttps://ieeexplore.ieee.org/document/8430424/