Selvaraja, ShankarShankarSelvarajaAbsil, PhilippePhilippeAbsilVan Campenhout, JorisJorisVan CampenhoutWinroth, GustafGustafWinrothMurdoch, GayleGayleMurdochLocorotondo, SabrinaSabrinaLocorotondoMilenin, AlexeyAlexeyMileninDelvaux, ChristieChristieDelvauxOng, PatrickPatrickOngSterckx, GuntherGuntherSterckxLepage, GuyGuyLepagePathak, ShibnathShibnathPathakBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutXie, WeiqiangWeiqiangXie2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24505193nm immersion lithography for high performance silicon photonic circuitsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857374