Production of dielectric filters with low defect levels for integrated optical devices

Mingels, StephanStephanMingelsKutty, NavasNavasKuttyTack, KlaasKlaasTackBangels, DriesDriesBangelsJanssens, EliasEliasJanssensHagedorn, HarroHarroHagedorn2023-12-182023-08-042023-08-072023-12-182023-03-17978-1-5106-5953-70277-786XWOS:001003452000054https://imec-publications.be/handle/20.500.12860/42258Production of dielectric filters with low defect levels for integrated optical devicesProceedings paper10.1117/12.2667774978-1-5106-5954-4WOS:001003452000054