Introducing a Thermal-Based Method for Measuring Dynamic Thin Film Thickness in Real Time as a Tool for Sensing Applications

Oudebrouckx, GillesGillesOudebrouckxThoelen, RonaldRonaldThoelenWagner, PatrickPatrickWagnerVandenryt, ThysThysVandenrytNivelle, PhilippePhilippeNivelleBormans, SeppeSeppeBormans2022-02-242022-02-2420210018-9456WOS:000604879000032https://imec-publications.be/handle/20.500.12860/39120Introducing a Thermal-Based Method for Measuring Dynamic Thin Film Thickness in Real Time as a Tool for Sensing ApplicationsJournal article10.1109/TIM.2020.3033444WOS:000604879000032PLANE SOURCE METHODCONDUCTIVITYBIOFILMDIFFUSIVITYHEATSUSCEPTIBILITYLIQUIDSENSOR