Stress techniques and mobility enhancement in FinFET architectures

Eneman, GeertGeertEnemanWitters, LiesbethLiesbethWittersMitard, JeromeJeromeMitardHellings, GeertGeertHellingsDe Keersgieter, AnAnDe KeersgieterBrunco, DavidDavidBruncoHikavyy, AndriyAndriyHikavyyVincent, BenjaminBenjaminVincentSimoen, EddyEddySimoenFavia, PaolaPaolaFaviaBender, HugoHugoBenderVeloso, AnabelaAnabelaVelosoChiarella, ThomasThomasChiarellaBoccardi, GuillaumeGuillaumeBoccardiKim, Min-SooMin-SooKimTogo, MitsuhiroMitsuhiroTogoLoo, RogerRogerLooDe Meyer, KristinKristinDe MeyerHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20655Stress techniques and mobility enhancement in FinFET architecturesMeeting abstract