CIMID, A technology for high density integration of electronic systems

Beyne, EricEricBeyneVan Hoof, RitaRitaVan HoofChristiaens, FilipFilipChristiaensRoggen, JeanJeanRoggenVan Puymbroeck, JanJanVan PuymbroeckHeermann, M.M.HeermannGouwy, G.G.GouwyBulcke, P.P.Bulcke2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/47CIMID, A technology for high density integration of electronic systemsProceedings paper