300mm wafer level WS2 p-MOS capacitor characterization, smulation, and analysis

Koladi Mootheri, VivekVivekKoladi MootheriOkuyama, AtsushiAtsushiOkuyamaSmets, QuentinQuentinSmetsSchram, TomTomSchramAsselberghs, IngeIngeAsselberghsHeyns, MarcMarcHeynsRadu, IulianaIulianaRaduLin, DennisDennisLin2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35404300mm wafer level WS2 p-MOS capacitor characterization, smulation, and analysisMeeting abstracthttps://www.ieeesisc.org/programs/2020_SISC_technical_program.pdf