Performance enhancement in Ge pMOSFETs with <100>-orientation fabricated with a Si-compatible process flow

Dutta Gupta, ShubhamShubhamDutta GuptaMitard, JeromeJeromeMitardEneman, GeertGeertEnemanDe Jaeger, BriceBriceDe JaegerMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15254Performance enhancement in Ge pMOSFETs with <100>-orientation fabricated with a Si-compatible process flowMeeting abstract