Czarnecki, PiotrPiotrCzarneckiRottenberg, XavierXavierRottenbergSoussan, PhilippePhilippeSoussanEkkels, PhillipPhillipEkkelsMuller, PhilippePhilippeMullerNolmans, PhilipPhilipNolmansDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmansPuers, BobBobPuersMarchand, LaurentLaurentMarchandDe Wolf, IngridIngridDe Wolf2021-10-172021-10-1720090924-4247https://imec-publications.be/handle/20.500.12860/15152Effect of substrate charging on the reliability of capacitive RF MEMS switchesJournal article