Witvrouw, AnnAnnWitvrouwVan Hoof, RitaRitaVan HoofBryce, GeorgeGeorgeBryceDu Bois, BertBertDu BoisVerbist, AgnesAgnesVerbistSeveri, SimoneSimoneSeveriHaspeslagh, LucLucHaspeslaghOsman, HarisHarisOsmanDe Coster, JeroenJeroenDe CosterWen, LianggongLianggongWenPuers, BobBobPuersBeernaert, RoelRoelBeernaertDe Smet, HerbertHerbertDe SmetRudra, SukumarSukumarRudraVan Thourhout, DriesDriesVan Thourhout2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18365SiGe MEMS technology: a platform technology enabling different demonstratorsMeeting abstract