Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Takabayashi, Alain YujiAlain YujiTakabayashiSattari, HamedHamedSattariEdinger, PierrePierreEdingerVerheyen, PeterPeterVerheyenGylfason, Kristinn B.Kristinn B.GylfasonBogaerts, WimWimBogaertsQuack, NielsNielsQuack2022-03-042022-03-0420211057-7157WOS:000638400700018https://imec-publications.be/handle/20.500.12860/39303Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS SwitchJournal article10.1109/JMEMS.2021.3060182WOS:000638400700018