Relationship between resist outgassing and witness sample contamination in NXE outgas qualification using electrons and EUV

Pollentier, IvanIvanPollentierLokasani, RagavaRagavaLokasaniGronheid, RoelRoelGronheidHill, S.S.HillTarrio, C.C.TarrioLucatorto, T.T.Lucatorto2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22946Relationship between resist outgassing and witness sample contamination in NXE outgas qualification using electrons and EUVProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1675249