Efficient physical defect model applied to PBTI in high-k stacks

Rzepa, G.G.RzepaFranco, JacopoJacopoFrancoSubirats, AlexandreAlexandreSubiratsJech, M.M.JechVaisman Chasin, AdrianAdrianVaisman ChasinGrill, A.A.GrillWaltl, M.M.WaltlKnobloch, T.T.KnoblochStampfer, B.B.StampferChiarella, ThomasThomasChiarellaHoriguchi, NaotoNaotoHoriguchiRagnarsson, Lars-AkeLars-AkeRagnarssonLinten, DimitriDimitriLintenGrasser, T.T.GrasserKaczer, BenBenKaczer2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29343Efficient physical defect model applied to PBTI in high-k stacksProceedings paperhttp://ieeexplore.ieee.org/document/7936425/