Heterogeneous integration of GaSb-based epitaxy on silicon-on-insulator: towards mid-infrared photonic integrated circuits for environmental and bio-medical applications

Hattasan, NannichaNannichaHattasanCerutti, L.L.CeruttiRodriguez, J.B.J.B.RodriguezTournie, E.E.TournieVan Thourhout, DriesDriesVan ThourhoutRoelkens, GuntherGuntherRoelkens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17234Heterogeneous integration of GaSb-based epitaxy on silicon-on-insulator: towards mid-infrared photonic integrated circuits for environmental and bio-medical applicationsProceedings paper