Tsai, WilmanWilmanTsaiRagnarsson, Lars-AkeLars-AkeRagnarssonPantisano, LuigiLuigiPantisanoChen, P.P.ChenOnsia, BartBartOnsiaSchram, TomTomSchramCartier, E.E.CartierKerber, AndreasAndreasKerberYoung, EdwardEdwardYoungCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-152021-10-152003-12https://imec-publications.be/handle/20.500.12860/8230Performance comparison of sub 1nm sputtered TiN/HfO2 nMOS and pMOSFETsProceedings paper