Exploiting energy sequencing of low energy SIMS to determine intrinsic chemical profiles with sub-nm precision

Morris, RichardRichardMorrisHase, ThomasThomasHase2021-10-252021-10-2520181071-1023https://imec-publications.be/handle/20.500.12860/31377Exploiting energy sequencing of low energy SIMS to determine intrinsic chemical profiles with sub-nm precisionJournal article