Experimental investigation of fabrication process-, transportation-, storage, and handling-induced contamination of 157-nm reticles and vacuum-UV cleaning

Okoroanyanwu, UzoUzoOkoroanyanwuStepanenko, NickolayNickolayStepanenkoVereecke, GuyGuyVereeckeEliat, AstridAstridEliatKocsis, MichaelMichaelKocsisKang, Young-SeogYoung-SeogKangJonckheere, RikRikJonckheereConard, ThierryThierryConardRonse, KurtKurtRonse2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9361Experimental investigation of fabrication process-, transportation-, storage, and handling-induced contamination of 157-nm reticles and vacuum-UV cleaningProceedings paper