Collaert, NadineNadineCollaertRooyackers, RitaRitaRooyackersHikavyy, AndriyAndriyHikavyyDixit, AbhisekAbhisekDixitLeys, FrederikFrederikLeysVerheyen, PeterPeterVerheyenLoo, RogerRogerLooJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-172021-10-1720080040-6090https://imec-publications.be/handle/20.500.12860/13546Multi-gate devices for the 32nm technology node and beyond: challenges for selective epitaxial growthJournal article