Buja, FedericoFedericoBujaHumbert, AurelieAurelieHumbertVisker, JakobJakobViskerPeng, LanLanPeng2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27942Influence of contact area on oxide-oxide fusion bonding quality between 200mm quartz and silicon wafersOral presentationhttp://www.waferbond-conference2017.org/index.php/topics/2-uncategorised/13-posters-waferbond-conference