Kenens, ConnyConnyKenensStorm, WolfgangWolfgangStormKnotter, D. M.D. M.KnotterDe Gendt, StefanStefanDe GendtVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeyns2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1291Removal of organic contamination from silicon surfacesProceedings paper