de Marneffe, Jean-FrancoisJean-Francoisde MarneffeYamaguchi, TatsuyaTatsuyaYamaguchiFujikawa, MakotoMakotoFujikawaRezvanov, AskarAskarRezvanovChanson, RomainRomainChansonZhang, JianranJianranZhangBabaei Gavan, KhashayarKhashayarBabaei GavanEl Otell, ZiadZiadEl OtellNozawa, S.S.NozawaKikuchi, Y.Y.KikuchiMaekawa, KaoruKaoruMaekawa2021-10-272021-10-2720192637-6113https://imec-publications.be/handle/20.500.12860/32807Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectricsJournal articlehttps://doi.org/10.1021/acsaelm.9b00589