Wiaux, VincentVincentWiauxBekaert, JoostJoostBekaertFung Chen, J.J.Fung ChenHsu, StephenStephenHsuRonse, KurtKurtRonseSocha, RobertRobertSochaVandenberghe, GeertGeertVandenbergheVan Den Broeke, DouglasDouglasVan Den Broeke2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9917Through pitch low-k1 contact hole imaging with CPLTM technologyProceedings paper