3D stacking cobalt and nickel microbumps and kinetics of corresponding IMCs at low temperatures

De Preter, IngeIngeDe PreterDerakhshandeh, JaberJaberDerakhshandehNagano, FuyaFuyaNaganoHoushmand Sharifi, ShaminShaminHoushmand SharifiHou, LinLinHouBex, PieterPieterBexSuhard, SamuelSamuelSuhardShibata, ToshiakiToshiakiShibataYukinori, OdaOdaYukinoriHashimoto, ShigeoShigeoHashimotoLieten, RubenRubenLietenRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/281503D stacking cobalt and nickel microbumps and kinetics of corresponding IMCs at low temperaturesProceedings paperhttp://ieeexplore.ieee.org/document/7968950/