Vaglio Pret, AlessandroAlessandroVaglio PretGraves, TreyTreyGravesBlankenship, DavidDavidBlankenshipBai, KunlunKunlunBaiRobertson, StewartStewartRobertsonDe Bisschop, PeterPeterDe BisschopBiafore, J.J.Biafore2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31997Comparative stochastic process variation bands for N7, N5, and N3 at EUVProceedings paperhttps://doi.org/10.1117/12.2299825