Impact of a SADP flow on the design and process for N10/N7 layers

Gillijns, WernerWernerGillijnsSherazi, YasserYasserSheraziTrivkovic, DarkoDarkoTrivkovicChava, BharaniBharaniChavaVandewalle, B.B.VandewalleGerousis, V.V.GerousisRaghavan, PraveenPraveenRaghavanRyckaert, JulienJulienRyckaertMercha, AbdelkarimAbdelkarimMerchaVerkest, DiederikDiederikVerkestMcIntyre, GregGregMcIntyreRonse, KurtKurtRonse2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25319Impact of a SADP flow on the design and process for N10/N7 layersProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2085923