Characterization of semiconductor samples using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy

Hermann, PeterPeterHermannHoehl, ArneArneHoehlUlrich, GeorgGeorgUlrichFleischmann, ClaudiaClaudiaFleischmannHermelink, AntjeAntjeHermelinkKästner, BerndBerndKästnerPatoka, PiotrPiotrPatokaHornemann, AndreaAndreaHornemannBeckhoff, BurkhardBurkhardBeckhoffRühl, EckartEckartRühlUlm, GerhardGerhardUlm2021-10-222021-10-2220141094-4087https://imec-publications.be/handle/20.500.12860/23921Characterization of semiconductor samples using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopyJournal articlehttp://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-22-15-17948