Chery, EmmanuelEmmanuelCheryBrady-Boyd, AnitaAnitaBrady-BoydBhatia, RitwikRitwikBhatiaPinho, NelsonNelsonPinhoSlabbekoorn, JohnJohnSlabbekoornArmini, SilviaSilviaArminiSundaram, GaneshGaneshSundaramBeyne, EricEricBeyne2023-12-142023-09-032023-12-1420231047-4838WOS:001051761000002https://imec-publications.be/handle/20.500.12860/42457Inorganic Capping Layers in RDL Technologies: Process Advantages and ReliabilityJournal article10.1007/s11837-023-06015-xWOS:001051761000002GAS-DIFFUSION BARRIERSCOPPERAL2O3DEPOSITIONENCAPSULATIONCORROSIONMETAL