Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS

Borden, P.P.BordenBechtler, L.L.BechtlerKlemme, B.B.KlemmeNijmeijer, R.R.NijmeijerJudge, E.E.JudgeDiebold, A.A.DieboldBennett, J.J.BennettVandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseCaymax, MattyMattyCaymaxPeytier, IvanIvanPeytier2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5083Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMSProceedings paper