Armini, SilviaSilviaArminiWhelan, CarolineCarolineWhelanMoinpour, MansourMansourMoinpourMaex, KarenKarenMaex2021-10-172021-10-1720081099-0062https://imec-publications.be/handle/20.500.12860/13315Mixed organic/inorganic abrasive particles during oxide CMPJournal article