Kar, Gouri SankarGouri SankarKarVan den Bosch, GeertGeertVan den BoschCacciato, AntonioAntonioCacciatoBlomme, PieterPieterBlommeArreghini, AntonioAntonioArreghiniBreuil, LaurentLaurentBreuilDe Keersgieter, AnAnDe KeersgieterParaschiv, VasileVasileParaschivVrancken, ChristaChristaVranckenDouhard, BastienBastienDouhardRichard, OlivierOlivierRichardDebusschere, IngridIngridDebusschereVan Houdt, JanJanVan HoudtVan Aerde, StevenStevenVan AerdeTang, BaojunBaojunTang2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19159Novel bi-layer poly-silicon channel vertical flash cell for ultrahigh density 3D sonos nand technologyProceedings paper