Claeys, CorCorClaeysSimoen, EddyEddySimoenPoyai, AmpornAmpornPoyaiHayama, KiyoteruKiyoteruHayamaKobayashi, K.K.KobayashiOhyama, HidenoriHidenoriOhyamaMohammadzadeh, A.A.Mohammadzadeh2023-11-022021-10-142023-11-022000nahttps://imec-publications.be/handle/20.500.12860/4199Radiation performance of shallow trench isolationProceedings paper