Shamiryan, DenisDenisShamiryanBaklanov, MikhaïlMikhaïlBaklanovTokei, ZsoltZsoltTokeiIacopi, FrancescaFrancescaIacopiMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6819Evaluation of Ta(N) diffusion barrier integrity on porous low-k filmsProceedings paper