A statistical approach to microdose induced degradation in FinFET devices

Griffoni, AlessioAlessioGriffoniGerardin, S.S.GerardinRoussel, PhilippePhilippeRousselDegraeve, RobinRobinDegraeveMeneghesso, G.G.MeneghessoPaccagnella, A.A.PaccagnellaSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-172021-10-1720090018-9499https://imec-publications.be/handle/20.500.12860/15396A statistical approach to microdose induced degradation in FinFET devicesJournal article