Kosma, VasilikiVasilikiKosmaDe Simone, DaniloDaniloDe SimoneVandenberghe, GeertGeertVandenberghe2021-10-272021-10-2720190914-9244https://imec-publications.be/handle/20.500.12860/33321Metal based materials for EUV lithographyJournal article10.3390/ma12132124https://doi.org/10.2494/photopolymer.32.179