Ultimate contact hole resolution using immersion lithography with line/space imaging

Truffert, VincentVincentTruffertBekaert, JoostJoostBekaertLazzarino, FredericFredericLazzarinoMaenhoudt, MireilleMireilleMaenhoudtMiller, AndyAndyMillerMoelants, MyriamMyriamMoelantsWu, TimothyTimothyWu2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16325Ultimate contact hole resolution using immersion lithography with line/space imagingProceedings paper